Bipolar and MOS Technology
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چکیده
Integrated circuit resistors can be classified into three groups: 1.) semiconductor films, 2.) deposited metal films, and 3.) cermets (a mixture of metal and dielectric materials). Of these, only the first two have found widespread use in high frequency circuits. Semiconductor films can be fabricated by diffusion into a host semi-insulating substrate, by depositing a polysilcon layer, or by ion implantation of impurities into a prescribed region. Polysilcon, or polycrystalline silicon, consists of many small sub micron crystals of silicon with random orientations.
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